Friday, November 30, 2012

DSA Patterning Scaling

DSA Patterning Scaling Through Lithography and Etch Process Integration, Demonstrate a wide range of directed self assembly integrations at 300 mm to enable low cost pattern scaling, Global collaboration on Directed Self Assembly Integrations (300 mm), Directed self assembly integration utilizes track, etch and cleaning processes to define the final pattern.

http://electronics.wesrch.com/paper-details/pdf-EL1SE14BIUFKN-dsa-patterning-scaling

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